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Scanning Probe Lithography - Microsystems Hyongsok T. Soh 2001 edition
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Scanning Probe Lithography - Microsystems
Hyongsok T. Soh
Scanning Probe Lithography (SPL) describes recent advances in the field of scanning probe lithography, a high resolution patterning technique that uses a sharp tip in close proximity to a sample to pattern nanometer-scale features on the sample.
197 pages, biography
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