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Silicon Micromachining - Cambridge Studies in Semiconductor Physics and Microelectronic Engineering Elwenspoek, M. (University of Twente, Enschede, The Netherlands)
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Silicon Micromachining - Cambridge Studies in Semiconductor Physics and Microelectronic Engineering
Elwenspoek, M. (University of Twente, Enschede, The Netherlands)
This comprehensive book provides an overview of the key techniques used in the fabrication of micron-scale structures in silicon. It is a blend of detailed experimental and theoretical material, and will be of great interest to graduate students and researchers in electrical engineering and materials science whose work involves the study of micro-electromechanical systems (MEMS).
420 pages, 388 b/w illus. 20 tables
| Mediji | Grāmatas Paperback Book (Grāmata ar mīksto vāku un līmēto muguru) |
| Izlaists | 2004. gada 19. augusts |
| ISBN13 | 9780521607674 |
| Izdevēji | Cambridge University Press |
| Lapas | 420 |
| Izmēri | 188 × 247 × 27 mm · 808 g |
| Valoda | Angļu |
| Sērijas redaktors | Ahmad, Haroon |
| Sērijas redaktors | Broers, Alec |
| Sērijas redaktors | Pepper, Michael |
