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Microstereolithography and other Fabrication Techniques for 3D MEMS Varadan, Vijay K. (Pennsylvania State University, PA)
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Microstereolithography and other Fabrication Techniques for 3D MEMS
Varadan, Vijay K. (Pennsylvania State University, PA)
Focusing on microstereolithography and other microfabrication for 3D MEMS, this volume discusses the principles of microstereolithography for fabrication of 3D MEMS devices. It provides an account of the developments in related microfabrication and combined architecture techniques, illustrating their application in the engineering field.
274 pages, Ill.
| Mediji | Grāmatas Hardcover Book (Grāmata ar cieto muguriņu un vāku) |
| Izlaists | 2001. gada 14. marts |
| ISBN13 | 9780471521853 |
| Izdevēji | John Wiley & Sons Inc |
| Lapas | 274 |
| Izmēri | 160 × 232 × 21 mm · 530 g |
| Valoda | Angļu |
