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Specialty Gas Analysis: A Practical Guidebook JD Hogan
Specialty Gas Analysis: A Practical Guidebook
JD Hogan
The semiconductor industry is moving toward gas-phase reagents, increasing the relative importance of gas purity. Anyone who deals in the manufacturing of these devices needs to understand the technology available for modern gas analysis.
200 pages, appendices, index
| Mediji | Grāmatas Hardcover Book (Grāmata ar cieto muguriņu un vāku) |
| Izlaists | 1996. gada 27. decembris |
| Oriģinālā izdošanas datums | 1997 |
| ISBN13 | 9780471185987 |
| Izdevēji | John Wiley & Sons Inc |
| Lapas | 200 |
| Izmēri | 161 × 241 × 16 mm · 503 g |
| Redaktors | Hogan, Jeremiah D. |