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Glow Discharge Processes: Sputtering and Plasma Etching Chapman, Brian (Burroughs Corp.)
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Paredzamā piegāde . gada 26. aug. - . gada 9. sept.
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Glow Discharge Processes: Sputtering and Plasma Etching
Chapman, Brian (Burroughs Corp.)
Develops detailed understanding of the deposition and etching of materials by sputtering discharge, and of etching of materials by chemically active discharge. Treats glow discharge at several levels from basic phenomena to industrial applications--practical techniques diligently related to fundamentals.
432 pages, illustrations, bibliography, index
| Mediji | Grāmatas Hardcover Book (Grāmata ar cieto muguriņu un vāku) |
| Izlaists | 1980. gada 25. septembris |
| ISBN13 | 9780471078289 |
| Izdevēji | John Wiley & Sons Inc |
| Lapas | 432 |
| Izmēri | 241 × 163 × 31 mm · 743 g |
| Valoda | Angļu |
