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EUV Lithography Vivek Bakshi
EUV Lithography
Vivek Bakshi
EUVL is an area of intense research and this book provides the foundation required for understanding and applying this technology. It offers contributions from the world's leading EUVL researchers, and provides all the critical information needed by practitioners and those wanting to enter the field.
700 pages, illustrations
| Mediji | Grāmatas Hardcover Book (Grāmata ar cieto muguriņu un vāku) |
| Izlaists | 2009. gada 16. janvāris |
| ISBN13 | 9780470471555 |
| Izdevēji | John Wiley & Sons Inc |
| Lapas | 704 |
| Izmēri | 191 × 259 × 45 mm · 1,58 kg |