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Capacitive Silicon Resonators: Performance Enhancement Methods Nguyen Van Toan 1. izdevums
Capacitive Silicon Resonators: Performance Enhancement Methods
Nguyen Van Toan
Recent progress in performance enhancement methods for capacitive silicon resonator will be outlined in this work. Several technological approaches including hermetic packaging based on the LTCC substrate, deep reactive ion etching, neutral beam etching technology, and metal-assisted chemical etching, will be discussed.
162 pages, 19 Tables, black and white; 119 Illustrations, black and white
| Mediji | Grāmatas Hardcover Book (Grāmata ar cieto muguriņu un vāku) |
| Izlaists | 2019. gada 24. jūnijs |
| ISBN13 | 9780367217761 |
| Izdevēji | Taylor & Francis Ltd |
| Lapas | 162 |
| Izmēri | 240 × 162 × 16 mm · 416 g |
| Valoda | Angļu |
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