Plasma Etching: Fundamentals and Applications - Series on Semiconductor Science and Technology - Sugawara, M. (Professor, Professor, Hachinohe Institute of Technology, Japan) - Grāmatas - Oxford University Press - 9780198562870 - 1998. gada 28. maijs

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Sugawara, M. (Professor, Professor, Hachinohe Institute of Technology, Japan)
Plasma Etching: Fundamentals and Applications - Series on Semiconductor Science and Technology Sugawara, M. (Professor, Professor, Hachinohe Institute of Technology, Japan)

Name: Plasma Etching: Fundamentals and Applications - Series on Semiconductor Science and Technology
Price: 303.99 EUR
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Author: Sugawara, M. (Professor, Professor, Hachinohe Institute of Technology, Japan)

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Plasma Etching: Fundamentals and Applications - Series on Semiconductor Science and Technology

Sugawara, M. (Professor, Professor, Hachinohe Institute of Technology, Japan)

The focus of this book is the remarkable advances in understanding of low pressure RF (radio frequency) glow discharges. A basic analytical theory and plasma physics are explained. Plasma diagnostics are also covered before the practicalities of etcher use are explored.

356 pages, 2 colour plates, 5 halftones, numerous line figures

Mediji	Grāmatas Hardcover Book (Grāmata ar cieto muguriņu un vāku)
Izlaists	1998. gada 28. maijs
ISBN13	9780198562870
Izdevēji	Oxford University Press
Lapas	356
Izmēri	163 × 242 × 23 mm · 743 g
Valoda	Angļu

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Skatīt visus Sugawara, M. (Professor, Professor, Hachinohe Institute of Technology, Japan)

Sugawara, M. (Professor, Professor, Hachinohe Institute of Technology, Japan) Plasma Etching: Fundamentals and Applications - Series on Semiconductor Science and Technology Sugawara, M. (Professor, Professor, Hachinohe Institute of Technology, Japan)

Plasma Etching: Fundamentals and Applications - Series on Semiconductor Science and Technology

Sugawara, M. (Professor, Professor, Hachinohe Institute of Technology, Japan)

Vairāk no tā paša izdevēja

Sugawara, M. (Professor, Professor, Hachinohe Institute of Technology, Japan)
Plasma Etching: Fundamentals and Applications - Series on Semiconductor Science and Technology Sugawara, M. (Professor, Professor, Hachinohe Institute of Technology, Japan)