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Handbook of Silicon Based MEMS Materials and Technologies - Micro & Nano Technologies Markku Tilli 3. izdevums
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Handbook of Silicon Based MEMS Materials and Technologies - Micro & Nano Technologies
Markku Tilli
1104 pages
| Mediji | Grāmatas Paperback Book (Grāmata ar mīksto vāku un līmēto muguru) |
| Izlaists | 2020. gada 17. aprīlis |
| ISBN13 | 9780128177860 |
| Izdevēji | Elsevier Science Publishing Co Inc |
| Lapas | 1026 |
| Izmēri | 275 × 216 × 54 mm · 2,33 kg |
| Redaktors | Lindroos, Veikko (Professor Emeritus, Physical Metallurgy and Materials Science, Aalto University, Finland) |
| Redaktors | Motooka, Teruaki (Professor Emeritus, Department of Materials Science and Engineering, Kyushu University, Japan) |
| Redaktors | Paulasto-Kroeckel, Mervi (Aalto University, School of Electrical Engineering, Finland) |
| Redaktors | Petzold, Matthias (Professor, Fraunhofer Institute for Microstructure of Materials and Systems IMWS, Germany) |
| Redaktors | Theuss, Horst (Lead Principal, Infineon Technologies, AG, Germany) |
| Redaktors | Tilli, Markku (Director and Senior Vice President of Research, Okmetic, Finland (retired)) |
