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Interlayer Dielectrics for Semiconductor Technologies Shyam Muraka
Interlayer Dielectrics for Semiconductor Technologies
Shyam Muraka
Semiconductor technologies are moving at such a fast pace that new materials are needed in all types of application. This work covers the science, properties and applications of dielectrics, their preparation, patterning, reliability and characterisation. It brings together the science and technology of interlayer dielectrics materials.
464 pages, Approx. 200 illustrations; Illustrations, unspecified
| Mediji | Grāmatas Hardcover Book (Grāmata ar cieto muguriņu un vāku) |
| Izlaists | 2003. gada 30. decembris |
| ISBN13 | 9780125112215 |
| Izdevēji | Elsevier Science Publishing Co Inc |
| Lapas | 464 |
| Izmēri | 165 × 240 × 25 mm · 1,01 kg |
| Redaktors | Eizenberg, Moshe |
| Redaktors | Murarka, Shyam P |
| Redaktors | Sinha, Ashok K |
