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Extreme Ultraviolet Lithography - Press Monographs Harry J. Levinson
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Extreme Ultraviolet Lithography - Press Monographs
Harry J. Levinson
Covers the many aspects of lithographic technology that needed to be addressed in order to make EUV lithography ready for high-volume manufacturing: exposure tools, light sources, masks, resists, process control, metrology, and computational lithography. Each topic is approached from the perspective of a practicing lithographer.
245 pages
| Mediji | Grāmatas Paperback Book (Grāmata ar mīksto vāku un līmēto muguru) |
| Izlaists | 2020. gada 30. decembris |
| ISBN13 | 9781510639393 |
| Izdevēji | SPIE Press |
| Lapas | 245 |
| Izmēri | 252 × 176 × 16 mm · 440 g |
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