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Principles Of Lithography Harry J. Levinson Fourth edition
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Principles Of Lithography
Harry J. Levinson
This newest edition of Principles of Lithography reflects the continuing advancement of lithographic technology. In recent years, certain topics, such as line-edge roughness (LER), multi-electron-beam writers, have become more significant to practicing lithographers. As such extensive treatments of these topics are provided.
630 pages
| Mediji | Grāmatas Book |
| Izlaists | 2019. gada 30. jūlijs |
| ISBN13 | 9781510627604 |
| Izdevēji | SPIE Press |
| Lapas | 630 |
| Izmēri | 262 × 185 × 31 mm · 1,42 kg |
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