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Handbook of Silicon Semiconductor Metrology Alain C. Diebold 1. izdevums
Handbook of Silicon Semiconductor Metrology
Alain C. Diebold
Containing more than 300 equations and nearly 500 drawings, photographs, and micrographs, this reference surveys key areas such as optical measurements and in-line calibration methods. It describes cleanroom-based measurement technology used during the manufacture of silicon integrated circuits and covers model-based, overlay, and dopant dose.
896 pages
| Mediji | Grāmatas Hardcover Book (Grāmata ar cieto muguriņu un vāku) |
| Izlaists | 2001. gada 29. jūnijs |
| ISBN13 | 9780824705060 |
| Izdevēji | Taylor & Francis Inc |
| Lapas | 894 |
| Izmēri | 185 × 257 × 49 mm · 1,65 kg |
| Valoda | Angļu |
| Redaktors | Diebold, Alain C. |