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Physics of Radiofrequency Capacitive Discharge Savinov, V. P. (Lomonosov Moscow State University, Moscow, Russia) 1. izdevums
Physics of Radiofrequency Capacitive Discharge
Savinov, V. P. (Lomonosov Moscow State University, Moscow, Russia)
This book describes the physical mechanism of high-frequency (radio-frequency) capacitive discharge (RFCD) of low and medium pressure and the properties of discharge plasma in detail. The work is intended for scientists engaged in gas discharge physics and low-temperature plasmas, and relevant specialties.
322 pages
| Mediji | Grāmatas Paperback Book (Grāmata ar mīksto vāku un līmēto muguru) |
| Izlaists | 2020. gada 30. jūnijs |
| ISBN13 | 9780367571627 |
| Izdevēji | Taylor & Francis Ltd |
| Lapas | 322 |
| Izmēri | 150 × 220 × 10 mm · 453 g |
| Valoda | Angļu |