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Rapid Thermal Processing: Science and Technology Fair
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Rapid Thermal Processing: Science and Technology
Fair
Discusses rapid thermal processing (RTP), an essential manufacturing technology for single-wafer processing in highly controlled environments. The text provides information on the suitability of RTP for thin film deposition, junction formation, silicides, epitaxy and "in situ" processing.
430 pages
| Mediji | Grāmatas Hardcover Book (Grāmata ar cieto muguriņu un vāku) |
| Izlaists | 1993. gada 15. aprīlis |
| ISBN13 | 9780122476907 |
| Izdevēji | Elsevier Science Publishing Co Inc |
| Lapas | 430 |
| Izmēri | 152 × 229 × 25 mm · 725 g |
| Redaktors | Fair, Richard B. |
